12/1/2011	9:11:17 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/1/2011	9:11:18 AM	Recipe started at 9:11 AM
12/1/2011	9:11:18 AM	Helium valve closed
12/1/2011	9:11:18 AM	H2 valve closed
12/1/2011	9:11:18 AM	BCl3 valve closed
12/1/2011	9:11:18 AM	PH3 valve closed
12/1/2011	9:11:18 AM	SiCl4 pre valve closed
12/1/2011	9:11:18 AM	SiCl4 post valve closed
12/1/2011	9:11:18 AM	Main Vac valve closed
12/1/2011	9:11:18 AM	Bypass valve closed
12/1/2011	9:11:18 AM	Bubbler valve closed
12/1/2011	9:11:18 AM	Helium MFC set to  0.000000
12/1/2011	9:11:18 AM	H2 MFC set to  0.000000
12/1/2011	9:11:18 AM	BCl3 MFC set to  0.000000
12/1/2011	9:11:18 AM	PHl3 MFC set to  0.000000
12/1/2011	9:11:18 AM	SiCl4 MFC set to  0.000000
12/1/2011	9:11:18 AM	Bypass solenoid MFC set to  0.000000
12/1/2011	9:11:18 AM	Tube furnace set to 0
12/1/2011	9:11:21 AM	H2 valve closed
12/1/2011	9:11:21 AM	BCl3 valve closed
12/1/2011	9:11:21 AM	PH3 valve closed
12/1/2011	9:11:21 AM	SiCl4 pre valve closed
12/1/2011	9:11:21 AM	SiCl4 post valve closed
12/1/2011	9:11:21 AM	Main Vac valve closed
12/1/2011	9:11:21 AM	Bypass valve closed
12/1/2011	9:11:21 AM	Bubbler valve closed
12/1/2011	9:11:21 AM	Helium valve opened
12/1/2011	9:11:21 AM	Helium MFC set to  500.000000
12/1/2011	9:11:21 AM	H2 MFC set to  0.000000
12/1/2011	9:11:21 AM	BCl3 MFC set to  0.000000
12/1/2011	9:11:21 AM	PHl3 MFC set to  0.000000
12/1/2011	9:11:21 AM	SiCl4 MFC set to  0.000000
12/1/2011	9:11:21 AM	Bypass solenoid MFC set to  0.000000
12/1/2011	9:11:21 AM	Tube furnace set to 0
12/1/2011	9:12:27 AM	Helium valve closed
12/1/2011	9:12:27 AM	H2 valve closed
12/1/2011	9:12:27 AM	BCl3 valve closed
12/1/2011	9:12:27 AM	PH3 valve closed
12/1/2011	9:12:27 AM	SiCl4 pre valve closed
12/1/2011	9:12:27 AM	SiCl4 post valve closed
12/1/2011	9:12:27 AM	Main Vac valve closed
12/1/2011	9:12:27 AM	Bypass valve closed
12/1/2011	9:12:27 AM	Bubbler valve closed
12/1/2011	9:12:27 AM	Helium MFC set to  0.000000
12/1/2011	9:12:27 AM	H2 MFC set to  0.000000
12/1/2011	9:12:27 AM	BCl3 MFC set to  0.000000
12/1/2011	9:12:27 AM	PHl3 MFC set to  0.000000
12/1/2011	9:12:27 AM	SiCl4 MFC set to  0.000000
12/1/2011	9:12:27 AM	Bypass solenoid MFC set to  0.000000
12/1/2011	9:12:28 AM	Tube furnace set to 0
12/1/2011	9:12:29 AM	Run finished at 9:12 AM
12/1/2011	9:12:29 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/1/2011	9:14:47 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/1/2011	9:14:48 AM	Recipe started at 9:14 AM
12/1/2011	9:14:48 AM	Helium valve closed
12/1/2011	9:14:48 AM	H2 valve closed
12/1/2011	9:14:48 AM	BCl3 valve closed
12/1/2011	9:14:48 AM	PH3 valve closed
12/1/2011	9:14:48 AM	SiCl4 pre valve closed
12/1/2011	9:14:48 AM	SiCl4 post valve closed
12/1/2011	9:14:48 AM	Main Vac valve closed
12/1/2011	9:14:48 AM	Bubbler valve closed
12/1/2011	9:14:48 AM	Bypass valve opened
12/1/2011	9:14:48 AM	Helium MFC set to  0.000000
12/1/2011	9:14:48 AM	H2 MFC set to  0.000000
12/1/2011	9:14:48 AM	BCl3 MFC set to  0.000000
12/1/2011	9:14:48 AM	PHl3 MFC set to  0.000000
12/1/2011	9:14:48 AM	SiCl4 MFC set to  0.000000
12/1/2011	9:14:48 AM	Bypass solenoid MFC set to  0.000000
12/1/2011	9:14:48 AM	Tube furnace set to 0
12/1/2011	9:16:19 AM	Helium valve closed
12/1/2011	9:16:19 AM	H2 valve closed
12/1/2011	9:16:19 AM	BCl3 valve closed
12/1/2011	9:16:19 AM	PH3 valve closed
12/1/2011	9:16:19 AM	SiCl4 pre valve closed
12/1/2011	9:16:19 AM	SiCl4 post valve closed
12/1/2011	9:16:19 AM	Main Vac valve closed
12/1/2011	9:16:19 AM	Bubbler valve closed
12/1/2011	9:16:19 AM	Bypass valve opened
12/1/2011	9:16:19 AM	Helium MFC set to  0.000000
12/1/2011	9:16:19 AM	H2 MFC set to  0.000000
12/1/2011	9:16:19 AM	BCl3 MFC set to  0.000000
12/1/2011	9:16:19 AM	PHl3 MFC set to  0.000000
12/1/2011	9:16:19 AM	SiCl4 MFC set to  0.000000
12/1/2011	9:16:19 AM	Bypass solenoid MFC set to  0.000000
12/1/2011	9:16:20 AM	Tube furnace set to 0
12/1/2011	9:17:20 AM	Helium valve closed
12/1/2011	9:17:20 AM	H2 valve closed
12/1/2011	9:17:20 AM	BCl3 valve closed
12/1/2011	9:17:20 AM	PH3 valve closed
12/1/2011	9:17:20 AM	SiCl4 pre valve closed
12/1/2011	9:17:20 AM	SiCl4 post valve closed
12/1/2011	9:17:20 AM	Bypass valve closed
12/1/2011	9:17:20 AM	Bubbler valve closed
12/1/2011	9:17:20 AM	Main Vac valve opened
12/1/2011	9:17:20 AM	Helium MFC set to  0.000000
12/1/2011	9:17:20 AM	H2 MFC set to  0.000000
12/1/2011	9:17:20 AM	BCl3 MFC set to  0.000000
12/1/2011	9:17:20 AM	PHl3 MFC set to  0.000000
12/1/2011	9:17:20 AM	SiCl4 MFC set to  0.000000
12/1/2011	9:17:20 AM	Bypass solenoid MFC set to  0.000000
12/1/2011	9:17:20 AM	Tube furnace set to 0
12/1/2011	9:17:21 AM	Run finished at 9:17 AM
12/1/2011	9:17:21 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/1/2011	10:10:36 AM	Main Vac valve closed
12/1/2011	10:12:50 AM	Main Vac valve opened
12/1/2011	10:24:29 AM	Recipe started at 10:24 AM
12/1/2011	10:24:29 AM	Helium valve closed
12/1/2011	10:24:29 AM	H2 valve closed
12/1/2011	10:24:29 AM	BCl3 valve closed
12/1/2011	10:24:29 AM	PH3 valve closed
12/1/2011	10:24:29 AM	SiCl4 pre valve closed
12/1/2011	10:24:29 AM	SiCl4 post valve closed
12/1/2011	10:24:29 AM	Main Vac valve closed
12/1/2011	10:24:29 AM	Bypass valve closed
12/1/2011	10:24:29 AM	Bubbler valve closed
12/1/2011	10:24:29 AM	Helium MFC set to  0.000000
12/1/2011	10:24:29 AM	H2 MFC set to  0.000000
12/1/2011	10:24:29 AM	BCl3 MFC set to  0.000000
12/1/2011	10:24:29 AM	PHl3 MFC set to  0.000000
12/1/2011	10:24:29 AM	SiCl4 MFC set to  0.000000
12/1/2011	10:24:29 AM	Bypass solenoid MFC set to  0.000000
12/1/2011	10:24:29 AM	Tube furnace set to 0
12/1/2011	10:24:32 AM	Helium valve closed
12/1/2011	10:24:32 AM	BCl3 valve closed
12/1/2011	10:24:32 AM	PH3 valve closed
12/1/2011	10:24:32 AM	SiCl4 pre valve closed
12/1/2011	10:24:32 AM	SiCl4 post valve closed
12/1/2011	10:24:32 AM	Main Vac valve closed
12/1/2011	10:24:32 AM	Bypass valve closed
12/1/2011	10:24:32 AM	Bubbler valve closed
12/1/2011	10:24:32 AM	H2 valve opened
12/1/2011	10:24:32 AM	Helium MFC set to  0.000000
12/1/2011	10:24:32 AM	H2 MFC set to  500.000000
12/1/2011	10:24:32 AM	BCl3 MFC set to  0.000000
12/1/2011	10:24:32 AM	PHl3 MFC set to  0.000000
12/1/2011	10:24:32 AM	SiCl4 MFC set to  0.000000
12/1/2011	10:24:32 AM	Bypass solenoid MFC set to  0.000000
12/1/2011	10:24:32 AM	Tube furnace set to 0
12/1/2011	10:25:42 AM	Helium valve closed
12/1/2011	10:25:42 AM	BCl3 valve closed
12/1/2011	10:25:42 AM	PH3 valve closed
12/1/2011	10:25:42 AM	SiCl4 pre valve closed
12/1/2011	10:25:42 AM	SiCl4 post valve closed
12/1/2011	10:25:42 AM	Main Vac valve closed
12/1/2011	10:25:42 AM	Bypass valve closed
12/1/2011	10:25:42 AM	H2 valve opened
12/1/2011	10:25:42 AM	Bubbler valve opened
12/1/2011	10:25:42 AM	Helium MFC set to  0.000000
12/1/2011	10:25:42 AM	H2 MFC set to  500.000000
12/1/2011	10:25:42 AM	BCl3 MFC set to  0.000000
12/1/2011	10:25:42 AM	PHl3 MFC set to  0.000000
12/1/2011	10:25:42 AM	SiCl4 MFC set to  0.000000
12/1/2011	10:25:42 AM	Bypass solenoid MFC set to  0.000000
12/1/2011	10:25:42 AM	Tube furnace set to 0
12/1/2011	10:25:43 AM	Helium valve closed
12/1/2011	10:25:43 AM	BCl3 valve closed
12/1/2011	10:25:43 AM	PH3 valve closed
12/1/2011	10:25:43 AM	SiCl4 pre valve closed
12/1/2011	10:25:43 AM	SiCl4 post valve closed
12/1/2011	10:25:43 AM	Main Vac valve closed
12/1/2011	10:25:43 AM	Bypass valve closed
12/1/2011	10:25:43 AM	H2 valve opened
12/1/2011	10:25:43 AM	Bubbler valve opened
12/1/2011	10:25:43 AM	Helium MFC set to  0.000000
12/1/2011	10:25:43 AM	H2 MFC set to  500.000000
12/1/2011	10:25:43 AM	BCl3 MFC set to  0.000000
12/1/2011	10:25:43 AM	PHl3 MFC set to  0.000000
12/1/2011	10:25:43 AM	SiCl4 MFC set to  0.000000
12/1/2011	10:25:43 AM	Bypass solenoid MFC set to  0.000000
12/1/2011	10:25:43 AM	Tube furnace set to 1000
12/1/2011	10:47:43 AM	Helium valve closed
12/1/2011	10:47:43 AM	PH3 valve closed
12/1/2011	10:47:43 AM	Main Vac valve closed
12/1/2011	10:47:43 AM	Bypass valve closed
12/1/2011	10:47:43 AM	H2 valve opened
12/1/2011	10:47:43 AM	BCl3 valve opened
12/1/2011	10:47:43 AM	SiCl4 pre valve opened
12/1/2011	10:47:43 AM	SiCl4 post valve opened
12/1/2011	10:47:43 AM	Bubbler valve opened
12/1/2011	10:47:43 AM	Helium MFC set to  0.000000
12/1/2011	10:47:43 AM	H2 MFC set to  500.000000
12/1/2011	10:47:43 AM	BCl3 MFC set to  3.000000
12/1/2011	10:47:43 AM	PHl3 MFC set to  0.000000
12/1/2011	10:47:43 AM	SiCl4 MFC set to  25.000000
12/1/2011	10:47:43 AM	Bypass solenoid MFC set to  0.000000
12/1/2011	10:47:43 AM	Tube furnace set to 1000
12/1/2011	11:07:43 AM	Helium valve closed
12/1/2011	11:07:43 AM	BCl3 valve closed
12/1/2011	11:07:43 AM	PH3 valve closed
12/1/2011	11:07:43 AM	SiCl4 pre valve closed
12/1/2011	11:07:43 AM	SiCl4 post valve closed
12/1/2011	11:07:43 AM	Main Vac valve closed
12/1/2011	11:07:43 AM	Bypass valve closed
12/1/2011	11:07:43 AM	H2 valve opened
12/1/2011	11:07:43 AM	Bubbler valve opened
12/1/2011	11:07:43 AM	Helium MFC set to  0.000000
12/1/2011	11:07:43 AM	H2 MFC set to  500.000000
12/1/2011	11:07:43 AM	BCl3 MFC set to  0.000000
12/1/2011	11:07:43 AM	PHl3 MFC set to  0.000000
12/1/2011	11:07:43 AM	SiCl4 MFC set to  0.000000
12/1/2011	11:07:43 AM	Bypass solenoid MFC set to  0.000000
12/1/2011	11:07:43 AM	Tube furnace set to 750
12/1/2011	11:12:43 AM	H2 valve closed
12/1/2011	11:12:43 AM	BCl3 valve closed
12/1/2011	11:12:43 AM	PH3 valve closed
12/1/2011	11:12:43 AM	SiCl4 pre valve closed
12/1/2011	11:12:43 AM	SiCl4 post valve closed
12/1/2011	11:12:43 AM	Main Vac valve closed
12/1/2011	11:12:43 AM	Bypass valve closed
12/1/2011	11:12:43 AM	Helium valve opened
12/1/2011	11:12:43 AM	Bubbler valve opened
12/1/2011	11:12:43 AM	Helium MFC set to  500.000000
12/1/2011	11:12:43 AM	H2 MFC set to  0.000000
12/1/2011	11:12:43 AM	BCl3 MFC set to  0.000000
12/1/2011	11:12:43 AM	PHl3 MFC set to  0.000000
12/1/2011	11:12:43 AM	SiCl4 MFC set to  0.000000
12/1/2011	11:12:43 AM	Bypass solenoid MFC set to  0.000000
12/1/2011	11:12:44 AM	Tube furnace set to 0
12/1/2011	11:32:44 AM	Helium valve closed
12/1/2011	11:32:44 AM	H2 valve closed
12/1/2011	11:32:44 AM	BCl3 valve closed
12/1/2011	11:32:44 AM	PH3 valve closed
12/1/2011	11:32:44 AM	SiCl4 pre valve closed
12/1/2011	11:32:44 AM	SiCl4 post valve closed
12/1/2011	11:32:44 AM	Main Vac valve closed
12/1/2011	11:32:44 AM	Bypass valve closed
12/1/2011	11:32:44 AM	Bubbler valve closed
12/1/2011	11:32:44 AM	Helium MFC set to  0.000000
12/1/2011	11:32:44 AM	H2 MFC set to  0.000000
12/1/2011	11:32:44 AM	BCl3 MFC set to  0.000000
12/1/2011	11:32:44 AM	PHl3 MFC set to  0.000000
12/1/2011	11:32:44 AM	SiCl4 MFC set to  0.000000
12/1/2011	11:32:44 AM	Bypass solenoid MFC set to  0.000000
12/1/2011	11:32:44 AM	Tube furnace set to 0
12/1/2011	11:32:45 AM	Run finished at 11:32 AM
12/1/2011	12:00:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/1/2011	12:00:32 PM	Recipe started at 12:00 PM
12/1/2011	12:00:32 PM	Helium valve closed
12/1/2011	12:00:32 PM	H2 valve closed
12/1/2011	12:00:32 PM	BCl3 valve closed
12/1/2011	12:00:32 PM	PH3 valve closed
12/1/2011	12:00:32 PM	SiCl4 pre valve closed
12/1/2011	12:00:32 PM	SiCl4 post valve closed
12/1/2011	12:00:32 PM	Main Vac valve closed
12/1/2011	12:00:32 PM	Bypass valve closed
12/1/2011	12:00:32 PM	Bubbler valve closed
12/1/2011	12:00:32 PM	Helium MFC set to  0.000000
12/1/2011	12:00:32 PM	H2 MFC set to  0.000000
12/1/2011	12:00:32 PM	BCl3 MFC set to  0.000000
12/1/2011	12:00:32 PM	PHl3 MFC set to  0.000000
12/1/2011	12:00:32 PM	SiCl4 MFC set to  0.000000
12/1/2011	12:00:32 PM	Bypass solenoid MFC set to  0.000000
12/1/2011	12:00:32 PM	Tube furnace set to 0
12/1/2011	12:00:35 PM	H2 valve closed
12/1/2011	12:00:35 PM	BCl3 valve closed
12/1/2011	12:00:35 PM	PH3 valve closed
12/1/2011	12:00:35 PM	SiCl4 pre valve closed
12/1/2011	12:00:35 PM	SiCl4 post valve closed
12/1/2011	12:00:35 PM	Main Vac valve closed
12/1/2011	12:00:35 PM	Bypass valve closed
12/1/2011	12:00:35 PM	Bubbler valve closed
12/1/2011	12:00:35 PM	Helium valve opened
12/1/2011	12:00:35 PM	Helium MFC set to  500.000000
12/1/2011	12:00:35 PM	H2 MFC set to  0.000000
12/1/2011	12:00:35 PM	BCl3 MFC set to  0.000000
12/1/2011	12:00:35 PM	PHl3 MFC set to  0.000000
12/1/2011	12:00:35 PM	SiCl4 MFC set to  0.000000
12/1/2011	12:00:35 PM	Bypass solenoid MFC set to  0.000000
12/1/2011	12:00:35 PM	Tube furnace set to 0
12/1/2011	12:00:43 PM	Helium valve closed
12/1/2011	12:00:43 PM	H2 valve closed
12/1/2011	12:00:43 PM	BCl3 valve closed
12/1/2011	12:00:43 PM	PH3 valve closed
12/1/2011	12:00:43 PM	SiCl4 pre valve closed
12/1/2011	12:00:43 PM	SiCl4 post valve closed
12/1/2011	12:00:43 PM	Main Vac valve closed
12/1/2011	12:00:43 PM	Bypass valve closed
12/1/2011	12:00:43 PM	Bubbler valve closed
12/1/2011	12:00:43 PM	Helium MFC set to  0.000000
12/1/2011	12:00:43 PM	H2 MFC set to  0.000000
12/1/2011	12:00:43 PM	BCl3 MFC set to  0.000000
12/1/2011	12:00:43 PM	PHl3 MFC set to  0.000000
12/1/2011	12:00:43 PM	SiCl4 MFC set to  0.000000
12/1/2011	12:00:43 PM	Bypass solenoid MFC set to  0.000000
12/1/2011	12:00:43 PM	Tube furnace set to 0
12/1/2011	12:00:44 PM	Run finished at 12:00 PM
12/1/2011	12:00:44 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/1/2011	12:03:42 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/1/2011	12:03:43 PM	Recipe started at 12:03 PM
12/1/2011	12:03:43 PM	Helium valve closed
12/1/2011	12:03:43 PM	H2 valve closed
12/1/2011	12:03:43 PM	BCl3 valve closed
12/1/2011	12:03:43 PM	PH3 valve closed
12/1/2011	12:03:43 PM	SiCl4 pre valve closed
12/1/2011	12:03:43 PM	SiCl4 post valve closed
12/1/2011	12:03:43 PM	Main Vac valve closed
12/1/2011	12:03:43 PM	Bubbler valve closed
12/1/2011	12:03:43 PM	Bypass valve opened
12/1/2011	12:03:43 PM	Helium MFC set to  0.000000
12/1/2011	12:03:43 PM	H2 MFC set to  0.000000
12/1/2011	12:03:43 PM	BCl3 MFC set to  0.000000
12/1/2011	12:03:43 PM	PHl3 MFC set to  0.000000
12/1/2011	12:03:43 PM	SiCl4 MFC set to  0.000000
12/1/2011	12:03:43 PM	Bypass solenoid MFC set to  0.000000
12/1/2011	12:03:43 PM	Tube furnace set to 0
12/1/2011	12:05:14 PM	Helium valve closed
12/1/2011	12:05:14 PM	H2 valve closed
12/1/2011	12:05:14 PM	BCl3 valve closed
12/1/2011	12:05:14 PM	PH3 valve closed
12/1/2011	12:05:14 PM	SiCl4 pre valve closed
12/1/2011	12:05:14 PM	SiCl4 post valve closed
12/1/2011	12:05:14 PM	Main Vac valve closed
12/1/2011	12:05:14 PM	Bubbler valve closed
12/1/2011	12:05:14 PM	Bypass valve opened
12/1/2011	12:05:14 PM	Helium MFC set to  0.000000
12/1/2011	12:05:14 PM	H2 MFC set to  0.000000
12/1/2011	12:05:14 PM	BCl3 MFC set to  0.000000
12/1/2011	12:05:14 PM	PHl3 MFC set to  0.000000
12/1/2011	12:05:14 PM	SiCl4 MFC set to  0.000000
12/1/2011	12:05:14 PM	Bypass solenoid MFC set to  0.000000
12/1/2011	12:05:14 PM	Tube furnace set to 0
12/1/2011	12:06:15 PM	Helium valve closed
12/1/2011	12:06:15 PM	H2 valve closed
12/1/2011	12:06:15 PM	BCl3 valve closed
12/1/2011	12:06:15 PM	PH3 valve closed
12/1/2011	12:06:15 PM	SiCl4 pre valve closed
12/1/2011	12:06:15 PM	SiCl4 post valve closed
12/1/2011	12:06:15 PM	Bypass valve closed
12/1/2011	12:06:15 PM	Bubbler valve closed
12/1/2011	12:06:15 PM	Main Vac valve opened
12/1/2011	12:06:15 PM	Helium MFC set to  0.000000
12/1/2011	12:06:15 PM	H2 MFC set to  0.000000
12/1/2011	12:06:15 PM	BCl3 MFC set to  0.000000
12/1/2011	12:06:15 PM	PHl3 MFC set to  0.000000
12/1/2011	12:06:15 PM	SiCl4 MFC set to  0.000000
12/1/2011	12:06:15 PM	Bypass solenoid MFC set to  0.000000
12/1/2011	12:06:15 PM	Tube furnace set to 0
12/1/2011	12:06:16 PM	Run finished at 12:06 PM
12/1/2011	12:06:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/1/2011	1:28:54 PM	Main Vac valve closed
12/1/2011	1:30:28 PM	Main Vac valve opened
12/1/2011	1:30:59 PM	Recipe started at 1:30 PM
12/1/2011	1:30:59 PM	Helium valve closed
12/1/2011	1:30:59 PM	H2 valve closed
12/1/2011	1:30:59 PM	BCl3 valve closed
12/1/2011	1:30:59 PM	PH3 valve closed
12/1/2011	1:30:59 PM	SiCl4 pre valve closed
12/1/2011	1:30:59 PM	SiCl4 post valve closed
12/1/2011	1:30:59 PM	Main Vac valve closed
12/1/2011	1:30:59 PM	Bypass valve closed
12/1/2011	1:30:59 PM	Bubbler valve closed
12/1/2011	1:30:59 PM	Helium MFC set to  0.000000
12/1/2011	1:30:59 PM	H2 MFC set to  0.000000
12/1/2011	1:30:59 PM	BCl3 MFC set to  0.000000
12/1/2011	1:30:59 PM	PHl3 MFC set to  0.000000
12/1/2011	1:30:59 PM	SiCl4 MFC set to  0.000000
12/1/2011	1:30:59 PM	Bypass solenoid MFC set to  0.000000
12/1/2011	1:30:59 PM	Tube furnace set to 0
12/1/2011	1:31:02 PM	Helium valve closed
12/1/2011	1:31:02 PM	BCl3 valve closed
12/1/2011	1:31:02 PM	PH3 valve closed
12/1/2011	1:31:02 PM	SiCl4 pre valve closed
12/1/2011	1:31:02 PM	SiCl4 post valve closed
12/1/2011	1:31:02 PM	Main Vac valve closed
12/1/2011	1:31:02 PM	Bypass valve closed
12/1/2011	1:31:02 PM	Bubbler valve closed
12/1/2011	1:31:02 PM	H2 valve opened
12/1/2011	1:31:02 PM	Helium MFC set to  0.000000
12/1/2011	1:31:02 PM	H2 MFC set to  500.000000
12/1/2011	1:31:02 PM	BCl3 MFC set to  0.000000
12/1/2011	1:31:02 PM	PHl3 MFC set to  0.000000
12/1/2011	1:31:02 PM	SiCl4 MFC set to  0.000000
12/1/2011	1:31:02 PM	Bypass solenoid MFC set to  0.000000
12/1/2011	1:31:02 PM	Tube furnace set to 0
12/1/2011	1:32:11 PM	Helium valve closed
12/1/2011	1:32:11 PM	BCl3 valve closed
12/1/2011	1:32:11 PM	PH3 valve closed
12/1/2011	1:32:11 PM	SiCl4 pre valve closed
12/1/2011	1:32:11 PM	SiCl4 post valve closed
12/1/2011	1:32:11 PM	Main Vac valve closed
12/1/2011	1:32:11 PM	Bypass valve closed
12/1/2011	1:32:11 PM	H2 valve opened
12/1/2011	1:32:11 PM	Bubbler valve opened
12/1/2011	1:32:11 PM	Helium MFC set to  0.000000
12/1/2011	1:32:11 PM	H2 MFC set to  500.000000
12/1/2011	1:32:11 PM	BCl3 MFC set to  0.000000
12/1/2011	1:32:11 PM	PHl3 MFC set to  0.000000
12/1/2011	1:32:11 PM	SiCl4 MFC set to  0.000000
12/1/2011	1:32:11 PM	Bypass solenoid MFC set to  0.000000
12/1/2011	1:32:11 PM	Tube furnace set to 0
12/1/2011	1:32:12 PM	Helium valve closed
12/1/2011	1:32:12 PM	BCl3 valve closed
12/1/2011	1:32:12 PM	PH3 valve closed
12/1/2011	1:32:12 PM	SiCl4 pre valve closed
12/1/2011	1:32:12 PM	SiCl4 post valve closed
12/1/2011	1:32:12 PM	Main Vac valve closed
12/1/2011	1:32:12 PM	Bypass valve closed
12/1/2011	1:32:12 PM	H2 valve opened
12/1/2011	1:32:12 PM	Bubbler valve opened
12/1/2011	1:32:12 PM	Helium MFC set to  0.000000
12/1/2011	1:32:12 PM	H2 MFC set to  500.000000
12/1/2011	1:32:12 PM	BCl3 MFC set to  0.000000
12/1/2011	1:32:12 PM	PHl3 MFC set to  0.000000
12/1/2011	1:32:12 PM	SiCl4 MFC set to  0.000000
12/1/2011	1:32:12 PM	Bypass solenoid MFC set to  0.000000
12/1/2011	1:32:13 PM	Tube furnace set to 1000
12/1/2011	1:54:13 PM	Helium valve closed
12/1/2011	1:54:13 PM	PH3 valve closed
12/1/2011	1:54:13 PM	Main Vac valve closed
12/1/2011	1:54:13 PM	Bypass valve closed
12/1/2011	1:54:13 PM	H2 valve opened
12/1/2011	1:54:13 PM	BCl3 valve opened
12/1/2011	1:54:13 PM	SiCl4 pre valve opened
12/1/2011	1:54:13 PM	SiCl4 post valve opened
12/1/2011	1:54:13 PM	Bubbler valve opened
12/1/2011	1:54:13 PM	Helium MFC set to  0.000000
12/1/2011	1:54:13 PM	H2 MFC set to  500.000000
12/1/2011	1:54:13 PM	BCl3 MFC set to  1.000000
12/1/2011	1:54:13 PM	PHl3 MFC set to  0.000000
12/1/2011	1:54:13 PM	SiCl4 MFC set to  25.000000
12/1/2011	1:54:13 PM	Bypass solenoid MFC set to  0.000000
12/1/2011	1:54:13 PM	Tube furnace set to 1000
12/1/2011	2:14:13 PM	Helium valve closed
12/1/2011	2:14:13 PM	BCl3 valve closed
12/1/2011	2:14:13 PM	PH3 valve closed
12/1/2011	2:14:13 PM	SiCl4 pre valve closed
12/1/2011	2:14:13 PM	SiCl4 post valve closed
12/1/2011	2:14:13 PM	Main Vac valve closed
12/1/2011	2:14:13 PM	Bypass valve closed
12/1/2011	2:14:13 PM	H2 valve opened
12/1/2011	2:14:13 PM	Bubbler valve opened
12/1/2011	2:14:13 PM	Helium MFC set to  0.000000
12/1/2011	2:14:13 PM	H2 MFC set to  500.000000
12/1/2011	2:14:13 PM	BCl3 MFC set to  0.000000
12/1/2011	2:14:13 PM	PHl3 MFC set to  0.000000
12/1/2011	2:14:13 PM	SiCl4 MFC set to  0.000000
12/1/2011	2:14:13 PM	Bypass solenoid MFC set to  0.000000
12/1/2011	2:14:13 PM	Tube furnace set to 750
12/1/2011	2:19:13 PM	H2 valve closed
12/1/2011	2:19:13 PM	BCl3 valve closed
12/1/2011	2:19:13 PM	PH3 valve closed
12/1/2011	2:19:13 PM	SiCl4 pre valve closed
12/1/2011	2:19:13 PM	SiCl4 post valve closed
12/1/2011	2:19:13 PM	Main Vac valve closed
12/1/2011	2:19:13 PM	Bypass valve closed
12/1/2011	2:19:13 PM	Helium valve opened
12/1/2011	2:19:13 PM	Bubbler valve opened
12/1/2011	2:19:13 PM	Helium MFC set to  500.000000
12/1/2011	2:19:13 PM	H2 MFC set to  0.000000
12/1/2011	2:19:13 PM	BCl3 MFC set to  0.000000
12/1/2011	2:19:13 PM	PHl3 MFC set to  0.000000
12/1/2011	2:19:13 PM	SiCl4 MFC set to  0.000000
12/1/2011	2:19:13 PM	Bypass solenoid MFC set to  0.000000
12/1/2011	2:19:13 PM	Tube furnace set to 0
12/1/2011	2:39:13 PM	Helium valve closed
12/1/2011	2:39:13 PM	H2 valve closed
12/1/2011	2:39:13 PM	BCl3 valve closed
12/1/2011	2:39:13 PM	PH3 valve closed
12/1/2011	2:39:13 PM	SiCl4 pre valve closed
12/1/2011	2:39:13 PM	SiCl4 post valve closed
12/1/2011	2:39:13 PM	Main Vac valve closed
12/1/2011	2:39:13 PM	Bypass valve closed
12/1/2011	2:39:13 PM	Bubbler valve closed
12/1/2011	2:39:13 PM	Helium MFC set to  0.000000
12/1/2011	2:39:13 PM	H2 MFC set to  0.000000
12/1/2011	2:39:13 PM	BCl3 MFC set to  0.000000
12/1/2011	2:39:13 PM	PHl3 MFC set to  0.000000
12/1/2011	2:39:13 PM	SiCl4 MFC set to  0.000000
12/1/2011	2:39:13 PM	Bypass solenoid MFC set to  0.000000
12/1/2011	2:39:13 PM	Tube furnace set to 0
12/1/2011	2:39:14 PM	Run finished at 2:39 PM
12/1/2011	3:32:34 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/1/2011	3:32:35 PM	Recipe started at 3:32 PM
12/1/2011	3:32:35 PM	Helium valve closed
12/1/2011	3:32:35 PM	H2 valve closed
12/1/2011	3:32:35 PM	BCl3 valve closed
12/1/2011	3:32:35 PM	PH3 valve closed
12/1/2011	3:32:35 PM	SiCl4 pre valve closed
12/1/2011	3:32:35 PM	SiCl4 post valve closed
12/1/2011	3:32:35 PM	Main Vac valve closed
12/1/2011	3:32:35 PM	Bypass valve closed
12/1/2011	3:32:35 PM	Bubbler valve closed
12/1/2011	3:32:35 PM	Helium MFC set to  0.000000
12/1/2011	3:32:35 PM	H2 MFC set to  0.000000
12/1/2011	3:32:35 PM	BCl3 MFC set to  0.000000
12/1/2011	3:32:35 PM	PHl3 MFC set to  0.000000
12/1/2011	3:32:35 PM	SiCl4 MFC set to  0.000000
12/1/2011	3:32:35 PM	Bypass solenoid MFC set to  0.000000
12/1/2011	3:32:35 PM	Tube furnace set to 0
12/1/2011	3:32:38 PM	H2 valve closed
12/1/2011	3:32:38 PM	BCl3 valve closed
12/1/2011	3:32:38 PM	PH3 valve closed
12/1/2011	3:32:38 PM	SiCl4 pre valve closed
12/1/2011	3:32:38 PM	SiCl4 post valve closed
12/1/2011	3:32:38 PM	Main Vac valve closed
12/1/2011	3:32:38 PM	Bypass valve closed
12/1/2011	3:32:38 PM	Bubbler valve closed
12/1/2011	3:32:38 PM	Helium valve opened
12/1/2011	3:32:38 PM	Helium MFC set to  500.000000
12/1/2011	3:32:38 PM	H2 MFC set to  0.000000
12/1/2011	3:32:38 PM	BCl3 MFC set to  0.000000
12/1/2011	3:32:38 PM	PHl3 MFC set to  0.000000
12/1/2011	3:32:38 PM	SiCl4 MFC set to  0.000000
12/1/2011	3:32:38 PM	Bypass solenoid MFC set to  0.000000
12/1/2011	3:32:38 PM	Tube furnace set to 0
12/1/2011	3:32:44 PM	Helium valve closed
12/1/2011	3:32:44 PM	H2 valve closed
12/1/2011	3:32:44 PM	BCl3 valve closed
12/1/2011	3:32:44 PM	PH3 valve closed
12/1/2011	3:32:44 PM	SiCl4 pre valve closed
12/1/2011	3:32:44 PM	SiCl4 post valve closed
12/1/2011	3:32:44 PM	Main Vac valve closed
12/1/2011	3:32:44 PM	Bypass valve closed
12/1/2011	3:32:44 PM	Bubbler valve closed
12/1/2011	3:32:44 PM	Helium MFC set to  0.000000
12/1/2011	3:32:44 PM	H2 MFC set to  0.000000
12/1/2011	3:32:44 PM	BCl3 MFC set to  0.000000
12/1/2011	3:32:44 PM	PHl3 MFC set to  0.000000
12/1/2011	3:32:44 PM	SiCl4 MFC set to  0.000000
12/1/2011	3:32:44 PM	Bypass solenoid MFC set to  0.000000
12/1/2011	3:32:45 PM	Tube furnace set to 0
12/1/2011	3:32:46 PM	Run finished at 3:32 PM
12/1/2011	3:32:46 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/1/2011	3:36:18 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/1/2011	3:36:19 PM	Recipe started at 3:36 PM
12/1/2011	3:36:19 PM	Helium valve closed
12/1/2011	3:36:19 PM	H2 valve closed
12/1/2011	3:36:19 PM	BCl3 valve closed
12/1/2011	3:36:19 PM	PH3 valve closed
12/1/2011	3:36:19 PM	SiCl4 pre valve closed
12/1/2011	3:36:19 PM	SiCl4 post valve closed
12/1/2011	3:36:19 PM	Main Vac valve closed
12/1/2011	3:36:19 PM	Bubbler valve closed
12/1/2011	3:36:19 PM	Bypass valve opened
12/1/2011	3:36:19 PM	Helium MFC set to  0.000000
12/1/2011	3:36:19 PM	H2 MFC set to  0.000000
12/1/2011	3:36:19 PM	BCl3 MFC set to  0.000000
12/1/2011	3:36:19 PM	PHl3 MFC set to  0.000000
12/1/2011	3:36:19 PM	SiCl4 MFC set to  0.000000
12/1/2011	3:36:19 PM	Bypass solenoid MFC set to  0.000000
12/1/2011	3:36:19 PM	Tube furnace set to 0
12/1/2011	3:37:46 PM	Helium valve closed
12/1/2011	3:37:46 PM	H2 valve closed
12/1/2011	3:37:46 PM	BCl3 valve closed
12/1/2011	3:37:46 PM	PH3 valve closed
12/1/2011	3:37:46 PM	SiCl4 pre valve closed
12/1/2011	3:37:46 PM	SiCl4 post valve closed
12/1/2011	3:37:46 PM	Main Vac valve closed
12/1/2011	3:37:46 PM	Bubbler valve closed
12/1/2011	3:37:46 PM	Bypass valve opened
12/1/2011	3:37:46 PM	Helium MFC set to  0.000000
12/1/2011	3:37:46 PM	H2 MFC set to  0.000000
12/1/2011	3:37:46 PM	BCl3 MFC set to  0.000000
12/1/2011	3:37:46 PM	PHl3 MFC set to  0.000000
12/1/2011	3:37:46 PM	SiCl4 MFC set to  0.000000
12/1/2011	3:37:46 PM	Bypass solenoid MFC set to  0.000000
12/1/2011	3:37:47 PM	Tube furnace set to 0
12/1/2011	3:38:47 PM	Helium valve closed
12/1/2011	3:38:47 PM	H2 valve closed
12/1/2011	3:38:47 PM	BCl3 valve closed
12/1/2011	3:38:47 PM	PH3 valve closed
12/1/2011	3:38:47 PM	SiCl4 pre valve closed
12/1/2011	3:38:47 PM	SiCl4 post valve closed
12/1/2011	3:38:47 PM	Bypass valve closed
12/1/2011	3:38:47 PM	Bubbler valve closed
12/1/2011	3:38:47 PM	Main Vac valve opened
12/1/2011	3:38:47 PM	Helium MFC set to  0.000000
12/1/2011	3:38:47 PM	H2 MFC set to  0.000000
12/1/2011	3:38:47 PM	BCl3 MFC set to  0.000000
12/1/2011	3:38:47 PM	PHl3 MFC set to  0.000000
12/1/2011	3:38:47 PM	SiCl4 MFC set to  0.000000
12/1/2011	3:38:47 PM	Bypass solenoid MFC set to  0.000000
12/1/2011	3:38:47 PM	Tube furnace set to 0
12/1/2011	3:38:48 PM	Run finished at 3:38 PM
12/1/2011	3:38:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/1/2011	4:41:41 PM	Main Vac valve closed
12/1/2011	4:42:14 PM	Main Vac valve opened
12/1/2011	4:42:46 PM	Recipe started at 4:42 PM
12/1/2011	4:42:46 PM	Helium valve closed
12/1/2011	4:42:46 PM	H2 valve closed
12/1/2011	4:42:46 PM	BCl3 valve closed
12/1/2011	4:42:46 PM	PH3 valve closed
12/1/2011	4:42:46 PM	SiCl4 pre valve closed
12/1/2011	4:42:46 PM	SiCl4 post valve closed
12/1/2011	4:42:46 PM	Main Vac valve closed
12/1/2011	4:42:46 PM	Bypass valve closed
12/1/2011	4:42:46 PM	Bubbler valve closed
12/1/2011	4:42:46 PM	Helium MFC set to  0.000000
12/1/2011	4:42:46 PM	H2 MFC set to  0.000000
12/1/2011	4:42:46 PM	BCl3 MFC set to  0.000000
12/1/2011	4:42:46 PM	PHl3 MFC set to  0.000000
12/1/2011	4:42:46 PM	SiCl4 MFC set to  0.000000
12/1/2011	4:42:46 PM	Bypass solenoid MFC set to  0.000000
12/1/2011	4:42:46 PM	Tube furnace set to 0
12/1/2011	4:42:49 PM	Helium valve closed
12/1/2011	4:42:49 PM	BCl3 valve closed
12/1/2011	4:42:49 PM	PH3 valve closed
12/1/2011	4:42:49 PM	SiCl4 pre valve closed
12/1/2011	4:42:49 PM	SiCl4 post valve closed
12/1/2011	4:42:49 PM	Main Vac valve closed
12/1/2011	4:42:49 PM	Bypass valve closed
12/1/2011	4:42:49 PM	Bubbler valve closed
12/1/2011	4:42:50 PM	H2 valve opened
12/1/2011	4:42:50 PM	Helium MFC set to  0.000000
12/1/2011	4:42:50 PM	H2 MFC set to  500.000000
12/1/2011	4:42:50 PM	BCl3 MFC set to  0.000000
12/1/2011	4:42:50 PM	PHl3 MFC set to  0.000000
12/1/2011	4:42:50 PM	SiCl4 MFC set to  0.000000
12/1/2011	4:42:50 PM	Bypass solenoid MFC set to  0.000000
12/1/2011	4:42:50 PM	Tube furnace set to 0
12/1/2011	4:43:58 PM	Helium valve closed
12/1/2011	4:43:58 PM	BCl3 valve closed
12/1/2011	4:43:58 PM	PH3 valve closed
12/1/2011	4:43:58 PM	SiCl4 pre valve closed
12/1/2011	4:43:58 PM	SiCl4 post valve closed
12/1/2011	4:43:58 PM	Main Vac valve closed
12/1/2011	4:43:58 PM	Bypass valve closed
12/1/2011	4:43:58 PM	H2 valve opened
12/1/2011	4:43:58 PM	Bubbler valve opened
12/1/2011	4:43:58 PM	Helium MFC set to  0.000000
12/1/2011	4:43:58 PM	H2 MFC set to  500.000000
12/1/2011	4:43:58 PM	BCl3 MFC set to  0.000000
12/1/2011	4:43:58 PM	PHl3 MFC set to  0.000000
12/1/2011	4:43:58 PM	SiCl4 MFC set to  0.000000
12/1/2011	4:43:58 PM	Bypass solenoid MFC set to  0.000000
12/1/2011	4:43:59 PM	Tube furnace set to 0
12/1/2011	4:44:00 PM	Helium valve closed
12/1/2011	4:44:00 PM	BCl3 valve closed
12/1/2011	4:44:00 PM	PH3 valve closed
12/1/2011	4:44:00 PM	SiCl4 pre valve closed
12/1/2011	4:44:00 PM	SiCl4 post valve closed
12/1/2011	4:44:00 PM	Main Vac valve closed
12/1/2011	4:44:00 PM	Bypass valve closed
12/1/2011	4:44:00 PM	H2 valve opened
12/1/2011	4:44:00 PM	Bubbler valve opened
12/1/2011	4:44:00 PM	Helium MFC set to  0.000000
12/1/2011	4:44:00 PM	H2 MFC set to  500.000000
12/1/2011	4:44:00 PM	BCl3 MFC set to  0.000000
12/1/2011	4:44:00 PM	PHl3 MFC set to  0.000000
12/1/2011	4:44:00 PM	SiCl4 MFC set to  0.000000
12/1/2011	4:44:00 PM	Bypass solenoid MFC set to  0.000000
12/1/2011	4:44:00 PM	Tube furnace set to 1000
12/1/2011	5:06:00 PM	Helium valve closed
12/1/2011	5:06:00 PM	PH3 valve closed
12/1/2011	5:06:00 PM	Main Vac valve closed
12/1/2011	5:06:00 PM	Bypass valve closed
12/1/2011	5:06:00 PM	H2 valve opened
12/1/2011	5:06:00 PM	BCl3 valve opened
12/1/2011	5:06:00 PM	SiCl4 pre valve opened
12/1/2011	5:06:00 PM	SiCl4 post valve opened
12/1/2011	5:06:00 PM	Bubbler valve opened
12/1/2011	5:06:00 PM	Helium MFC set to  0.000000
12/1/2011	5:06:00 PM	H2 MFC set to  500.000000
12/1/2011	5:06:00 PM	BCl3 MFC set to  1.000000
12/1/2011	5:06:00 PM	PHl3 MFC set to  0.000000
12/1/2011	5:06:00 PM	SiCl4 MFC set to  25.000000
12/1/2011	5:06:00 PM	Bypass solenoid MFC set to  0.000000
12/1/2011	5:06:00 PM	Tube furnace set to 1000
12/1/2011	5:31:00 PM	Helium valve closed
12/1/2011	5:31:00 PM	BCl3 valve closed
12/1/2011	5:31:00 PM	PH3 valve closed
12/1/2011	5:31:00 PM	SiCl4 pre valve closed
12/1/2011	5:31:00 PM	SiCl4 post valve closed
12/1/2011	5:31:00 PM	Main Vac valve closed
12/1/2011	5:31:00 PM	Bypass valve closed
12/1/2011	5:31:00 PM	H2 valve opened
12/1/2011	5:31:00 PM	Bubbler valve opened
12/1/2011	5:31:00 PM	Helium MFC set to  0.000000
12/1/2011	5:31:00 PM	H2 MFC set to  500.000000
12/1/2011	5:31:00 PM	BCl3 MFC set to  0.000000
12/1/2011	5:31:00 PM	PHl3 MFC set to  0.000000
12/1/2011	5:31:00 PM	SiCl4 MFC set to  0.000000
12/1/2011	5:31:00 PM	Bypass solenoid MFC set to  0.000000
12/1/2011	5:31:00 PM	Tube furnace set to 750
12/1/2011	5:36:00 PM	H2 valve closed
12/1/2011	5:36:00 PM	BCl3 valve closed
12/1/2011	5:36:00 PM	PH3 valve closed
12/1/2011	5:36:00 PM	SiCl4 pre valve closed
12/1/2011	5:36:00 PM	SiCl4 post valve closed
12/1/2011	5:36:00 PM	Main Vac valve closed
12/1/2011	5:36:00 PM	Bypass valve closed
12/1/2011	5:36:00 PM	Helium valve opened
12/1/2011	5:36:00 PM	Bubbler valve opened
12/1/2011	5:36:00 PM	Helium MFC set to  500.000000
12/1/2011	5:36:00 PM	H2 MFC set to  0.000000
12/1/2011	5:36:00 PM	BCl3 MFC set to  0.000000
12/1/2011	5:36:00 PM	PHl3 MFC set to  0.000000
12/1/2011	5:36:00 PM	SiCl4 MFC set to  0.000000
12/1/2011	5:36:00 PM	Bypass solenoid MFC set to  0.000000
12/1/2011	5:36:00 PM	Tube furnace set to 0
12/1/2011	5:51:29 PM	Helium valve closed
12/1/2011	5:51:29 PM	H2 valve closed
12/1/2011	5:51:29 PM	BCl3 valve closed
12/1/2011	5:51:29 PM	PH3 valve closed
12/1/2011	5:51:29 PM	SiCl4 pre valve closed
12/1/2011	5:51:29 PM	SiCl4 post valve closed
12/1/2011	5:51:29 PM	Main Vac valve closed
12/1/2011	5:51:29 PM	Bypass valve closed
12/1/2011	5:51:29 PM	Bubbler valve closed
12/1/2011	5:51:29 PM	Helium MFC set to  0.000000
12/1/2011	5:51:29 PM	H2 MFC set to  0.000000
12/1/2011	5:51:29 PM	BCl3 MFC set to  0.000000
12/1/2011	5:51:29 PM	PHl3 MFC set to  0.000000
12/1/2011	5:51:29 PM	SiCl4 MFC set to  0.000000
12/1/2011	5:51:29 PM	Bypass solenoid MFC set to  0.000000
12/1/2011	5:51:29 PM	Tube furnace set to 0
12/1/2011	5:51:30 PM	Run finished at 5:51 PM
12/1/2011	5:54:11 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/1/2011	5:54:12 PM	Recipe started at 5:54 PM
12/1/2011	5:54:12 PM	Helium valve closed
12/1/2011	5:54:12 PM	H2 valve closed
12/1/2011	5:54:12 PM	BCl3 valve closed
12/1/2011	5:54:12 PM	PH3 valve closed
12/1/2011	5:54:12 PM	SiCl4 pre valve closed
12/1/2011	5:54:12 PM	SiCl4 post valve closed
12/1/2011	5:54:12 PM	Main Vac valve closed
12/1/2011	5:54:12 PM	Bubbler valve closed
12/1/2011	5:54:12 PM	Bypass valve opened
12/1/2011	5:54:12 PM	Helium MFC set to  0.000000
12/1/2011	5:54:12 PM	H2 MFC set to  0.000000
12/1/2011	5:54:12 PM	BCl3 MFC set to  0.000000
12/1/2011	5:54:12 PM	PHl3 MFC set to  0.000000
12/1/2011	5:54:12 PM	SiCl4 MFC set to  0.000000
12/1/2011	5:54:12 PM	Bypass solenoid MFC set to  0.000000
12/1/2011	5:54:12 PM	Tube furnace set to 0
12/1/2011	5:56:23 PM	Helium valve closed
12/1/2011	5:56:23 PM	H2 valve closed
12/1/2011	5:56:23 PM	BCl3 valve closed
12/1/2011	5:56:23 PM	PH3 valve closed
12/1/2011	5:56:23 PM	SiCl4 pre valve closed
12/1/2011	5:56:23 PM	SiCl4 post valve closed
12/1/2011	5:56:23 PM	Main Vac valve closed
12/1/2011	5:56:23 PM	Bubbler valve closed
12/1/2011	5:56:23 PM	Bypass valve opened
12/1/2011	5:56:23 PM	Helium MFC set to  0.000000
12/1/2011	5:56:23 PM	H2 MFC set to  0.000000
12/1/2011	5:56:23 PM	BCl3 MFC set to  0.000000
12/1/2011	5:56:23 PM	PHl3 MFC set to  0.000000
12/1/2011	5:56:23 PM	SiCl4 MFC set to  0.000000
12/1/2011	5:56:23 PM	Bypass solenoid MFC set to  0.000000
12/1/2011	5:56:23 PM	Tube furnace set to 0
12/1/2011	5:57:23 PM	Helium valve closed
12/1/2011	5:57:23 PM	H2 valve closed
12/1/2011	5:57:23 PM	BCl3 valve closed
12/1/2011	5:57:23 PM	PH3 valve closed
12/1/2011	5:57:23 PM	SiCl4 pre valve closed
12/1/2011	5:57:23 PM	SiCl4 post valve closed
12/1/2011	5:57:23 PM	Bypass valve closed
12/1/2011	5:57:23 PM	Bubbler valve closed
12/1/2011	5:57:23 PM	Main Vac valve opened
12/1/2011	5:57:23 PM	Helium MFC set to  0.000000
12/1/2011	5:57:23 PM	H2 MFC set to  0.000000
12/1/2011	5:57:23 PM	BCl3 MFC set to  0.000000
12/1/2011	5:57:23 PM	PHl3 MFC set to  0.000000
12/1/2011	5:57:23 PM	SiCl4 MFC set to  0.000000
12/1/2011	5:57:23 PM	Bypass solenoid MFC set to  0.000000
12/1/2011	5:57:23 PM	Tube furnace set to 0
12/1/2011	5:57:24 PM	Run finished at 5:57 PM
12/1/2011	5:57:24 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/1/2011	6:14:19 PM	BCl3 MFC set to  0.700000
12/1/2011	6:14:27 PM	BCl3 valve opened
12/1/2011	6:14:42 PM	BCl3 valve closed
12/1/2011	6:14:45 PM	BCl3 MFC set to  0.000000
12/1/2011	6:17:13 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/1/2011	6:17:14 PM	Recipe started at 6:17 PM
12/1/2011	6:17:14 PM	Helium valve closed
12/1/2011	6:17:14 PM	H2 valve closed
12/1/2011	6:17:14 PM	BCl3 valve closed
12/1/2011	6:17:14 PM	PH3 valve closed
12/1/2011	6:17:14 PM	SiCl4 pre valve closed
12/1/2011	6:17:14 PM	SiCl4 post valve closed
12/1/2011	6:17:14 PM	Main Vac valve closed
12/1/2011	6:17:14 PM	Bypass valve closed
12/1/2011	6:17:14 PM	Bubbler valve closed
12/1/2011	6:17:14 PM	Helium MFC set to  0.000000
12/1/2011	6:17:14 PM	H2 MFC set to  0.000000
12/1/2011	6:17:14 PM	BCl3 MFC set to  0.000000
12/1/2011	6:17:14 PM	PHl3 MFC set to  0.000000
12/1/2011	6:17:14 PM	SiCl4 MFC set to  0.000000
12/1/2011	6:17:14 PM	Bypass solenoid MFC set to  0.000000
12/1/2011	6:17:14 PM	Tube furnace set to 0
12/1/2011	6:17:17 PM	H2 valve closed
12/1/2011	6:17:17 PM	BCl3 valve closed
12/1/2011	6:17:17 PM	PH3 valve closed
12/1/2011	6:17:17 PM	SiCl4 pre valve closed
12/1/2011	6:17:17 PM	SiCl4 post valve closed
12/1/2011	6:17:17 PM	Main Vac valve closed
12/1/2011	6:17:17 PM	Bypass valve closed
12/1/2011	6:17:17 PM	Bubbler valve closed
12/1/2011	6:17:17 PM	Helium valve opened
12/1/2011	6:17:17 PM	Helium MFC set to  500.000000
12/1/2011	6:17:17 PM	H2 MFC set to  0.000000
12/1/2011	6:17:17 PM	BCl3 MFC set to  0.000000
12/1/2011	6:17:17 PM	PHl3 MFC set to  0.000000
12/1/2011	6:17:17 PM	SiCl4 MFC set to  0.000000
12/1/2011	6:17:17 PM	Bypass solenoid MFC set to  0.000000
12/1/2011	6:17:17 PM	Tube furnace set to 0
12/1/2011	6:18:21 PM	Helium valve closed
12/1/2011	6:18:21 PM	H2 valve closed
12/1/2011	6:18:21 PM	BCl3 valve closed
12/1/2011	6:18:21 PM	PH3 valve closed
12/1/2011	6:18:21 PM	SiCl4 pre valve closed
12/1/2011	6:18:21 PM	SiCl4 post valve closed
12/1/2011	6:18:21 PM	Main Vac valve closed
12/1/2011	6:18:21 PM	Bypass valve closed
12/1/2011	6:18:21 PM	Bubbler valve closed
12/1/2011	6:18:21 PM	Helium MFC set to  0.000000
12/1/2011	6:18:21 PM	H2 MFC set to  0.000000
12/1/2011	6:18:21 PM	BCl3 MFC set to  0.000000
12/1/2011	6:18:21 PM	PHl3 MFC set to  0.000000
12/1/2011	6:18:21 PM	SiCl4 MFC set to  0.000000
12/1/2011	6:18:21 PM	Bypass solenoid MFC set to  0.000000
12/1/2011	6:18:21 PM	Tube furnace set to 0
12/1/2011	6:18:22 PM	Run finished at 6:18 PM
12/1/2011	6:18:22 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/1/2011	6:23:08 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/1/2011	6:23:09 PM	Recipe started at 6:23 PM
12/1/2011	6:23:09 PM	Helium valve closed
12/1/2011	6:23:09 PM	H2 valve closed
12/1/2011	6:23:09 PM	BCl3 valve closed
12/1/2011	6:23:09 PM	PH3 valve closed
12/1/2011	6:23:09 PM	SiCl4 pre valve closed
12/1/2011	6:23:09 PM	SiCl4 post valve closed
12/1/2011	6:23:09 PM	Main Vac valve closed
12/1/2011	6:23:09 PM	Bubbler valve closed
12/1/2011	6:23:09 PM	Bypass valve opened
12/1/2011	6:23:09 PM	Helium MFC set to  0.000000
12/1/2011	6:23:09 PM	H2 MFC set to  0.000000
12/1/2011	6:23:09 PM	BCl3 MFC set to  0.000000
12/1/2011	6:23:09 PM	PHl3 MFC set to  0.000000
12/1/2011	6:23:09 PM	SiCl4 MFC set to  0.000000
12/1/2011	6:23:09 PM	Bypass solenoid MFC set to  0.000000
12/1/2011	6:23:10 PM	Tube furnace set to 0
12/1/2011	6:25:12 PM	Helium valve closed
12/1/2011	6:25:12 PM	H2 valve closed
12/1/2011	6:25:12 PM	BCl3 valve closed
12/1/2011	6:25:12 PM	PH3 valve closed
12/1/2011	6:25:12 PM	SiCl4 pre valve closed
12/1/2011	6:25:12 PM	SiCl4 post valve closed
12/1/2011	6:25:12 PM	Main Vac valve closed
12/1/2011	6:25:12 PM	Bubbler valve closed
12/1/2011	6:25:12 PM	Bypass valve opened
12/1/2011	6:25:12 PM	Helium MFC set to  0.000000
12/1/2011	6:25:12 PM	H2 MFC set to  0.000000
12/1/2011	6:25:12 PM	BCl3 MFC set to  0.000000
12/1/2011	6:25:12 PM	PHl3 MFC set to  0.000000
12/1/2011	6:25:12 PM	SiCl4 MFC set to  0.000000
12/1/2011	6:25:12 PM	Bypass solenoid MFC set to  0.000000
12/1/2011	6:25:12 PM	Tube furnace set to 0
12/1/2011	6:26:12 PM	Helium valve closed
12/1/2011	6:26:12 PM	H2 valve closed
12/1/2011	6:26:12 PM	BCl3 valve closed
12/1/2011	6:26:12 PM	PH3 valve closed
12/1/2011	6:26:12 PM	SiCl4 pre valve closed
12/1/2011	6:26:12 PM	SiCl4 post valve closed
12/1/2011	6:26:12 PM	Bypass valve closed
12/1/2011	6:26:12 PM	Bubbler valve closed
12/1/2011	6:26:12 PM	Main Vac valve opened
12/1/2011	6:26:12 PM	Helium MFC set to  0.000000
12/1/2011	6:26:12 PM	H2 MFC set to  0.000000
12/1/2011	6:26:12 PM	BCl3 MFC set to  0.000000
12/1/2011	6:26:12 PM	PHl3 MFC set to  0.000000
12/1/2011	6:26:12 PM	SiCl4 MFC set to  0.000000
12/1/2011	6:26:12 PM	Bypass solenoid MFC set to  0.000000
12/1/2011	6:26:12 PM	Tube furnace set to 0
12/1/2011	6:26:13 PM	Run finished at 6:26 PM
12/1/2011	6:26:13 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/1/2011	8:01:59 PM	Main Vac valve closed
12/1/2011	8:02:16 PM	Main Vac valve opened
12/1/2011	8:05:30 PM	Recipe started at 8:05 PM
12/1/2011	8:05:30 PM	H2 valve closed
12/1/2011	8:05:30 PM	BCl3 valve closed
12/1/2011	8:05:30 PM	PH3 valve closed
12/1/2011	8:05:30 PM	SiCl4 pre valve closed
12/1/2011	8:05:30 PM	SiCl4 post valve closed
12/1/2011	8:05:30 PM	Main Vac valve closed
12/1/2011	8:05:30 PM	Bypass valve closed
12/1/2011	8:05:30 PM	Bubbler valve closed
12/1/2011	8:05:30 PM	Helium valve opened
12/1/2011	8:05:30 PM	Helium MFC set to  0.000000
12/1/2011	8:05:30 PM	H2 MFC set to  0.000000
12/1/2011	8:05:30 PM	BCl3 MFC set to  0.000000
12/1/2011	8:05:30 PM	PHl3 MFC set to  0.000000
12/1/2011	8:05:30 PM	SiCl4 MFC set to  0.000000
12/1/2011	8:05:30 PM	Bypass solenoid MFC set to  0.000000
12/1/2011	8:05:31 PM	Tube furnace set to 0
12/1/2011	8:05:34 PM	Helium valve closed
12/1/2011	8:05:34 PM	BCl3 valve closed
12/1/2011	8:05:34 PM	PH3 valve closed
12/1/2011	8:05:34 PM	SiCl4 pre valve closed
12/1/2011	8:05:34 PM	SiCl4 post valve closed
12/1/2011	8:05:34 PM	Main Vac valve closed
12/1/2011	8:05:34 PM	Bypass valve closed
12/1/2011	8:05:34 PM	Bubbler valve closed
12/1/2011	8:05:34 PM	H2 valve opened
12/1/2011	8:05:34 PM	Helium MFC set to  0.000000
12/1/2011	8:05:34 PM	H2 MFC set to  500.000000
12/1/2011	8:05:34 PM	BCl3 MFC set to  0.000000
12/1/2011	8:05:34 PM	PHl3 MFC set to  0.000000
12/1/2011	8:05:34 PM	SiCl4 MFC set to  0.000000
12/1/2011	8:05:34 PM	Bypass solenoid MFC set to  0.000000
12/1/2011	8:05:34 PM	Tube furnace set to 0
12/1/2011	8:06:41 PM	Helium valve closed
12/1/2011	8:06:41 PM	BCl3 valve closed
12/1/2011	8:06:41 PM	PH3 valve closed
12/1/2011	8:06:41 PM	SiCl4 pre valve closed
12/1/2011	8:06:41 PM	SiCl4 post valve closed
12/1/2011	8:06:41 PM	Main Vac valve closed
12/1/2011	8:06:41 PM	Bypass valve closed
12/1/2011	8:06:41 PM	H2 valve opened
12/1/2011	8:06:41 PM	Bubbler valve opened
12/1/2011	8:06:41 PM	Helium MFC set to  0.000000
12/1/2011	8:06:41 PM	H2 MFC set to  500.000000
12/1/2011	8:06:41 PM	BCl3 MFC set to  0.000000
12/1/2011	8:06:41 PM	PHl3 MFC set to  0.000000
12/1/2011	8:06:41 PM	SiCl4 MFC set to  0.000000
12/1/2011	8:06:41 PM	Bypass solenoid MFC set to  0.000000
12/1/2011	8:06:41 PM	Tube furnace set to 0
12/1/2011	8:06:42 PM	Helium valve closed
12/1/2011	8:06:42 PM	BCl3 valve closed
12/1/2011	8:06:42 PM	PH3 valve closed
12/1/2011	8:06:42 PM	SiCl4 pre valve closed
12/1/2011	8:06:42 PM	SiCl4 post valve closed
12/1/2011	8:06:42 PM	Main Vac valve closed
12/1/2011	8:06:42 PM	Bypass valve closed
12/1/2011	8:06:42 PM	H2 valve opened
12/1/2011	8:06:42 PM	Bubbler valve opened
12/1/2011	8:06:42 PM	Helium MFC set to  0.000000
12/1/2011	8:06:42 PM	H2 MFC set to  500.000000
12/1/2011	8:06:42 PM	BCl3 MFC set to  0.000000
12/1/2011	8:06:42 PM	PHl3 MFC set to  0.000000
12/1/2011	8:06:42 PM	SiCl4 MFC set to  0.000000
12/1/2011	8:06:42 PM	Bypass solenoid MFC set to  0.000000
12/1/2011	8:06:42 PM	Tube furnace set to 1000
12/1/2011	8:31:42 PM	Helium valve closed
12/1/2011	8:31:42 PM	PH3 valve closed
12/1/2011	8:31:42 PM	Main Vac valve closed
12/1/2011	8:31:42 PM	Bypass valve closed
12/1/2011	8:31:42 PM	H2 valve opened
12/1/2011	8:31:42 PM	BCl3 valve opened
12/1/2011	8:31:42 PM	SiCl4 pre valve opened
12/1/2011	8:31:42 PM	SiCl4 post valve opened
12/1/2011	8:31:42 PM	Bubbler valve opened
12/1/2011	8:31:42 PM	Helium MFC set to  0.000000
12/1/2011	8:31:42 PM	H2 MFC set to  450.000000
12/1/2011	8:31:42 PM	BCl3 MFC set to  0.850000
12/1/2011	8:31:42 PM	PHl3 MFC set to  0.000000
12/1/2011	8:31:42 PM	SiCl4 MFC set to  50.000000
12/1/2011	8:31:42 PM	Bypass solenoid MFC set to  0.000000
12/1/2011	8:31:42 PM	Tube furnace set to 1000
12/1/2011	9:01:42 PM	Helium valve closed
12/1/2011	9:01:42 PM	BCl3 valve closed
12/1/2011	9:01:42 PM	PH3 valve closed
12/1/2011	9:01:42 PM	SiCl4 pre valve closed
12/1/2011	9:01:42 PM	SiCl4 post valve closed
12/1/2011	9:01:42 PM	Main Vac valve closed
12/1/2011	9:01:42 PM	Bypass valve closed
12/1/2011	9:01:42 PM	H2 valve opened
12/1/2011	9:01:42 PM	Bubbler valve opened
12/1/2011	9:01:42 PM	Helium MFC set to  0.000000
12/1/2011	9:01:42 PM	H2 MFC set to  500.000000
12/1/2011	9:01:42 PM	BCl3 MFC set to  0.000000
12/1/2011	9:01:42 PM	PHl3 MFC set to  0.000000
12/1/2011	9:01:42 PM	SiCl4 MFC set to  0.000000
12/1/2011	9:01:42 PM	Bypass solenoid MFC set to  0.000000
12/1/2011	9:01:42 PM	Tube furnace set to 750
12/1/2011	9:16:42 PM	H2 valve closed
12/1/2011	9:16:42 PM	BCl3 valve closed
12/1/2011	9:16:42 PM	PH3 valve closed
12/1/2011	9:16:42 PM	SiCl4 pre valve closed
12/1/2011	9:16:42 PM	SiCl4 post valve closed
12/1/2011	9:16:42 PM	Main Vac valve closed
12/1/2011	9:16:42 PM	Bypass valve closed
12/1/2011	9:16:42 PM	Helium valve opened
12/1/2011	9:16:42 PM	Bubbler valve opened
12/1/2011	9:16:42 PM	Helium MFC set to  500.000000
12/1/2011	9:16:42 PM	H2 MFC set to  0.000000
12/1/2011	9:16:42 PM	BCl3 MFC set to  0.000000
12/1/2011	9:16:42 PM	PHl3 MFC set to  0.000000
12/1/2011	9:16:42 PM	SiCl4 MFC set to  0.000000
12/1/2011	9:16:42 PM	Bypass solenoid MFC set to  0.000000
12/1/2011	9:16:43 PM	Tube furnace set to 0
12/1/2011	9:36:43 PM	Helium valve closed
12/1/2011	9:36:43 PM	H2 valve closed
12/1/2011	9:36:43 PM	BCl3 valve closed
12/1/2011	9:36:43 PM	PH3 valve closed
12/1/2011	9:36:43 PM	SiCl4 pre valve closed
12/1/2011	9:36:43 PM	SiCl4 post valve closed
12/1/2011	9:36:43 PM	Main Vac valve closed
12/1/2011	9:36:43 PM	Bypass valve closed
12/1/2011	9:36:43 PM	Bubbler valve closed
12/1/2011	9:36:43 PM	Helium MFC set to  0.000000
12/1/2011	9:36:43 PM	H2 MFC set to  0.000000
12/1/2011	9:36:43 PM	BCl3 MFC set to  0.000000
12/1/2011	9:36:43 PM	PHl3 MFC set to  0.000000
12/1/2011	9:36:43 PM	SiCl4 MFC set to  0.000000
12/1/2011	9:36:43 PM	Bypass solenoid MFC set to  0.000000
12/1/2011	9:36:43 PM	Tube furnace set to 0
12/1/2011	9:56:43 PM	Helium valve closed
12/1/2011	9:56:43 PM	H2 valve closed
12/1/2011	9:56:43 PM	BCl3 valve closed
12/1/2011	9:56:43 PM	PH3 valve closed
12/1/2011	9:56:43 PM	SiCl4 pre valve closed
12/1/2011	9:56:43 PM	SiCl4 post valve closed
12/1/2011	9:56:43 PM	Main Vac valve closed
12/1/2011	9:56:43 PM	Bubbler valve closed
12/1/2011	9:56:43 PM	Bypass valve opened
12/1/2011	9:56:43 PM	Helium MFC set to  0.000000
12/1/2011	9:56:43 PM	H2 MFC set to  0.000000
12/1/2011	9:56:43 PM	BCl3 MFC set to  0.000000
12/1/2011	9:56:43 PM	PHl3 MFC set to  0.000000
12/1/2011	9:56:43 PM	SiCl4 MFC set to  0.000000
12/1/2011	9:56:43 PM	Bypass solenoid MFC set to  0.000000
12/1/2011	9:56:43 PM	Tube furnace set to 0
12/1/2011	9:58:28 PM	Helium valve closed
12/1/2011	9:58:28 PM	H2 valve closed
12/1/2011	9:58:28 PM	BCl3 valve closed
12/1/2011	9:58:28 PM	PH3 valve closed
12/1/2011	9:58:28 PM	SiCl4 pre valve closed
12/1/2011	9:58:28 PM	SiCl4 post valve closed
12/1/2011	9:58:28 PM	Main Vac valve closed
12/1/2011	9:58:28 PM	Bubbler valve closed
12/1/2011	9:58:28 PM	Bypass valve opened
12/1/2011	9:58:28 PM	Helium MFC set to  0.000000
12/1/2011	9:58:28 PM	H2 MFC set to  0.000000
12/1/2011	9:58:28 PM	BCl3 MFC set to  0.000000
12/1/2011	9:58:28 PM	PHl3 MFC set to  0.000000
12/1/2011	9:58:28 PM	SiCl4 MFC set to  0.000000
12/1/2011	9:58:28 PM	Bypass solenoid MFC set to  0.000000
12/1/2011	9:58:28 PM	Tube furnace set to 0
12/1/2011	9:59:28 PM	Helium valve closed
12/1/2011	9:59:28 PM	H2 valve closed
12/1/2011	9:59:28 PM	BCl3 valve closed
12/1/2011	9:59:28 PM	PH3 valve closed
12/1/2011	9:59:28 PM	SiCl4 pre valve closed
12/1/2011	9:59:28 PM	SiCl4 post valve closed
12/1/2011	9:59:28 PM	Bypass valve closed
12/1/2011	9:59:28 PM	Bubbler valve closed
12/1/2011	9:59:28 PM	Main Vac valve opened
12/1/2011	9:59:28 PM	Helium MFC set to  0.000000
12/1/2011	9:59:28 PM	H2 MFC set to  0.000000
12/1/2011	9:59:28 PM	BCl3 MFC set to  0.000000
12/1/2011	9:59:28 PM	PHl3 MFC set to  0.000000
12/1/2011	9:59:28 PM	SiCl4 MFC set to  0.000000
12/1/2011	9:59:28 PM	Bypass solenoid MFC set to  0.000000
12/1/2011	9:59:29 PM	Tube furnace set to 0
12/1/2011	10:28:43 PM	Run aborted at 10:28 PM
12/1/2011	10:28:43 PM	Helium valve closed
12/1/2011	10:28:43 PM	H2 valve closed
12/1/2011	10:28:43 PM	BCl3 valve closed
12/1/2011	10:28:43 PM	PH3 valve closed
12/1/2011	10:28:43 PM	SiCl4 pre valve closed
12/1/2011	10:28:43 PM	SiCl4 post valve closed
12/1/2011	10:28:43 PM	Bypass valve closed
12/1/2011	10:28:43 PM	Main Vac valve closed
12/1/2011	10:28:43 PM	Bubbler valve closed
12/1/2011	10:28:43 PM	Helium MFC set to  0.000000
12/1/2011	10:28:43 PM	H2 MFC set to  0.000000
12/1/2011	10:28:43 PM	BCl3 MFC set to  0.000000
12/1/2011	10:28:43 PM	PHl3 MFC set to  0.000000
12/1/2011	10:28:43 PM	SiCl4 MFC set to  0.000000
12/1/2011	10:28:43 PM	Tube furnace set to 0
12/1/2011	10:28:45 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/1/2011	10:28:46 PM	Recipe started at 10:28 PM
12/1/2011	10:28:46 PM	Helium valve closed
12/1/2011	10:28:46 PM	H2 valve closed
12/1/2011	10:28:46 PM	BCl3 valve closed
12/1/2011	10:28:46 PM	PH3 valve closed
12/1/2011	10:28:46 PM	SiCl4 pre valve closed
12/1/2011	10:28:46 PM	SiCl4 post valve closed
12/1/2011	10:28:46 PM	Main Vac valve closed
12/1/2011	10:28:46 PM	Bypass valve closed
12/1/2011	10:28:46 PM	Bubbler valve closed
12/1/2011	10:28:46 PM	Helium MFC set to  0.000000
12/1/2011	10:28:46 PM	H2 MFC set to  0.000000
12/1/2011	10:28:46 PM	BCl3 MFC set to  0.000000
12/1/2011	10:28:46 PM	PHl3 MFC set to  0.000000
12/1/2011	10:28:46 PM	SiCl4 MFC set to  0.000000
12/1/2011	10:28:46 PM	Bypass solenoid MFC set to  0.000000
12/1/2011	10:28:46 PM	Tube furnace set to 0
12/1/2011	10:28:49 PM	H2 valve closed
12/1/2011	10:28:49 PM	BCl3 valve closed
12/1/2011	10:28:49 PM	PH3 valve closed
12/1/2011	10:28:49 PM	SiCl4 pre valve closed
12/1/2011	10:28:49 PM	SiCl4 post valve closed
12/1/2011	10:28:49 PM	Main Vac valve closed
12/1/2011	10:28:49 PM	Bypass valve closed
12/1/2011	10:28:49 PM	Bubbler valve closed
12/1/2011	10:28:49 PM	Helium valve opened
12/1/2011	10:28:49 PM	Helium MFC set to  500.000000
12/1/2011	10:28:49 PM	H2 MFC set to  0.000000
12/1/2011	10:28:49 PM	BCl3 MFC set to  0.000000
12/1/2011	10:28:49 PM	PHl3 MFC set to  0.000000
12/1/2011	10:28:49 PM	SiCl4 MFC set to  0.000000
12/1/2011	10:28:49 PM	Bypass solenoid MFC set to  0.000000
12/1/2011	10:28:50 PM	Tube furnace set to 0
12/1/2011	10:29:52 PM	Helium valve closed
12/1/2011	10:29:52 PM	H2 valve closed
12/1/2011	10:29:52 PM	BCl3 valve closed
12/1/2011	10:29:52 PM	PH3 valve closed
12/1/2011	10:29:52 PM	SiCl4 pre valve closed
12/1/2011	10:29:52 PM	SiCl4 post valve closed
12/1/2011	10:29:52 PM	Main Vac valve closed
12/1/2011	10:29:52 PM	Bypass valve closed
12/1/2011	10:29:52 PM	Bubbler valve closed
12/1/2011	10:29:52 PM	Helium MFC set to  0.000000
12/1/2011	10:29:52 PM	H2 MFC set to  0.000000
12/1/2011	10:29:52 PM	BCl3 MFC set to  0.000000
12/1/2011	10:29:52 PM	PHl3 MFC set to  0.000000
12/1/2011	10:29:52 PM	SiCl4 MFC set to  0.000000
12/1/2011	10:29:52 PM	Bypass solenoid MFC set to  0.000000
12/1/2011	10:29:52 PM	Tube furnace set to 0
12/1/2011	10:29:53 PM	Run finished at 10:29 PM
12/1/2011	10:29:53 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/1/2011	10:34:05 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/1/2011	10:34:06 PM	Recipe started at 10:34 PM
12/1/2011	10:34:06 PM	Helium valve closed
12/1/2011	10:34:06 PM	H2 valve closed
12/1/2011	10:34:06 PM	BCl3 valve closed
12/1/2011	10:34:06 PM	PH3 valve closed
12/1/2011	10:34:06 PM	SiCl4 pre valve closed
12/1/2011	10:34:06 PM	SiCl4 post valve closed
12/1/2011	10:34:06 PM	Main Vac valve closed
12/1/2011	10:34:06 PM	Bubbler valve closed
12/1/2011	10:34:06 PM	Bypass valve opened
12/1/2011	10:34:06 PM	Helium MFC set to  0.000000
12/1/2011	10:34:06 PM	H2 MFC set to  0.000000
12/1/2011	10:34:06 PM	BCl3 MFC set to  0.000000
12/1/2011	10:34:06 PM	PHl3 MFC set to  0.000000
12/1/2011	10:34:06 PM	SiCl4 MFC set to  0.000000
12/1/2011	10:34:06 PM	Bypass solenoid MFC set to  0.000000
12/1/2011	10:34:06 PM	Tube furnace set to 0
12/1/2011	10:35:46 PM	Helium valve closed
12/1/2011	10:35:46 PM	H2 valve closed
12/1/2011	10:35:46 PM	BCl3 valve closed
12/1/2011	10:35:46 PM	PH3 valve closed
12/1/2011	10:35:47 PM	SiCl4 pre valve closed
12/1/2011	10:35:47 PM	SiCl4 post valve closed
12/1/2011	10:35:47 PM	Main Vac valve closed
12/1/2011	10:35:47 PM	Bubbler valve closed
12/1/2011	10:35:47 PM	Bypass valve opened
12/1/2011	10:35:47 PM	Helium MFC set to  0.000000
12/1/2011	10:35:47 PM	H2 MFC set to  0.000000
12/1/2011	10:35:47 PM	BCl3 MFC set to  0.000000
12/1/2011	10:35:47 PM	PHl3 MFC set to  0.000000
12/1/2011	10:35:47 PM	SiCl4 MFC set to  0.000000
12/1/2011	10:35:47 PM	Bypass solenoid MFC set to  0.000000
12/1/2011	10:35:47 PM	Tube furnace set to 0
12/1/2011	10:36:47 PM	Helium valve closed
12/1/2011	10:36:47 PM	H2 valve closed
12/1/2011	10:36:47 PM	BCl3 valve closed
12/1/2011	10:36:47 PM	PH3 valve closed
12/1/2011	10:36:47 PM	SiCl4 pre valve closed
12/1/2011	10:36:47 PM	SiCl4 post valve closed
12/1/2011	10:36:47 PM	Bypass valve closed
12/1/2011	10:36:47 PM	Bubbler valve closed
12/1/2011	10:36:47 PM	Main Vac valve opened
12/1/2011	10:36:47 PM	Helium MFC set to  0.000000
12/1/2011	10:36:47 PM	H2 MFC set to  0.000000
12/1/2011	10:36:47 PM	BCl3 MFC set to  0.000000
12/1/2011	10:36:47 PM	PHl3 MFC set to  0.000000
12/1/2011	10:36:47 PM	SiCl4 MFC set to  0.000000
12/1/2011	10:36:47 PM	Bypass solenoid MFC set to  0.000000
12/1/2011	10:36:47 PM	Tube furnace set to 0
12/1/2011	10:36:48 PM	Run finished at 10:36 PM
12/1/2011	10:36:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/1/2011	10:40:26 PM	Recipe started at 10:40 PM
12/1/2011	10:40:26 PM	Helium valve closed
12/1/2011	10:40:26 PM	H2 valve closed
12/1/2011	10:40:26 PM	BCl3 valve closed
12/1/2011	10:40:26 PM	PH3 valve closed
12/1/2011	10:40:26 PM	SiCl4 pre valve closed
12/1/2011	10:40:26 PM	SiCl4 post valve closed
12/1/2011	10:40:26 PM	Main Vac valve closed
12/1/2011	10:40:26 PM	Bypass valve closed
12/1/2011	10:40:26 PM	Bubbler valve closed
12/1/2011	10:40:26 PM	Helium MFC set to  0.000000
12/1/2011	10:40:26 PM	H2 MFC set to  0.000000
12/1/2011	10:40:26 PM	BCl3 MFC set to  0.000000
12/1/2011	10:40:26 PM	PHl3 MFC set to  0.000000
12/1/2011	10:40:26 PM	SiCl4 MFC set to  0.000000
12/1/2011	10:40:26 PM	Bypass solenoid MFC set to  0.000000
12/1/2011	10:40:27 PM	Tube furnace set to 0
12/1/2011	10:40:30 PM	Helium valve closed
12/1/2011	10:40:30 PM	H2 valve closed
12/1/2011	10:40:30 PM	BCl3 valve closed
12/1/2011	10:40:30 PM	PH3 valve closed
12/1/2011	10:40:30 PM	SiCl4 pre valve closed
12/1/2011	10:40:30 PM	SiCl4 post valve closed
12/1/2011	10:40:30 PM	Bypass valve closed
12/1/2011	10:40:30 PM	Bubbler valve closed
12/1/2011	10:40:30 PM	Main Vac valve opened
12/1/2011	10:40:30 PM	Helium MFC set to  0.000000
12/1/2011	10:40:30 PM	H2 MFC set to  0.000000
12/1/2011	10:40:30 PM	BCl3 MFC set to  0.000000
12/1/2011	10:40:30 PM	PHl3 MFC set to  0.000000
12/1/2011	10:40:30 PM	SiCl4 MFC set to  0.000000
12/1/2011	10:40:30 PM	Bypass solenoid MFC set to  0.000000
12/1/2011	10:40:30 PM	Tube furnace set to 0
